TOBI corporation
HOMECompanySemiconductorEquipmentPrivacypolicyInquiry
   english.gifjapanese.gif

Multipurpose Processor/Spin Etcher





  semi-multipurpose2-img.jpg
We have a case unlike the real thing to a product of a photograph.
  Model : TMS-410E
 
icon.gifFeatures
    Temperature control, drainage selection, and various functions can be added. (The photo is teflon + PVC body. )
 
icon.gifSpecifications
   
Substrate size: Φ2 inch 〜 Φ8 inch
Acid solution Acid and alkali type
Clean unit HEPA filter
Options selectable 2-4 drains, and nozzles for chemical,Filter,etc
Power supply AC100v or 200v
CDA. more 0.5Mpa .
DIW. more 0.2Mpa .

※ It is designed by customers spec, and various applications can be corresponded easily.
     

株式会社トービ TEL:0471-84-7255 or 080-4075-1975(高橋)
 〒270-1164 千葉県我孫子市つくし野4-6-1-102