Manual Spinner / Desk-Top Manual Spinner


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We have a case unlike the real thing to a product of a photograph.
  Model : MSS−300
 
icon.gifFeature
    Simple design, cost performance, and safety improvement
 
icon.gifSpecification
   
Work size: Φ2 inch 〜 Φ6 inch
Cup diameter Φ300mm
Range of revolution speed 100-5000 rpm
Revolution speed accuracy ±1rpm
Spindle motor AC servo motor
Revolution speed display Digital
Revolution speed setting Liquid crystal touch panel setting
Recipe setting Ten programs ×50 patterns
Option Vacuum chuck and vacuum pump
Utility Power supply and vacuum

※ It is designed by customers spec, and various applications can be corresponded easily.
     


Manual Spincoater / Desk-Top Manual Spinner


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We have a case unlike the real thing to a product of a photograph.
  Model : MSC-300T
 
icon.gifFeature
    Simple design, cost performance, and safety improvement.
 
icon.gifSpecification
   
Work size: Φ2 inch 〜 Φ6 inch
Cup diameter Φ300mm
Range of revolution speed 100-5000 rpm
Revolution speed accuracy ±1rpm
Spindle motor AC servo motor
Revolution speed display Digital
Revolution speed setting Liquid crystal touch panel setting
Nozzle Two systems(pressurizing force feed type simple container)
Air cylinder drive.
Recipe setting Ten programs ×50 patterns
Option Vacuum chuck and vacuum pump, and pressurized tank
Utility Power supply and vacuum

※ It is designed by customers spec, and various applications can be corresponded easily.
     


Multiple Spinner


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We have a case unlike the real thing to a product of a photograph.
  Model : TMSC-6000
 
icon.gifFeature
    Cassette to cassette type automatic multipurpose processor to be equipped with clean unit. (The photograph is coater + developer + hot plate. )
 
icon.gifSpecification
   
Work size: Φ6 inch 〜 Φ12 inch
Work transfer Three atmospheric axis clean robot
Clean unit ULPA filter
Data set display Liquid crystal touch panel
Coater Two nozzle and back rinse as standard
Developer Chemical temperature-controller, nozzle cleaning function, and back rinse as standard
Hot plate 3 steps for Drying + cooling
Option Spin Cleaner, Spin Coater, Spin Developer, Spin Etcher, Spin Remover Spin Dryer of 6 functions can be done in one equipment,or you can choose your required functions. High-pressure jet nozzle, UV, excimer, hot plate,Filter, etc.
Utility Power supply, CDA., nitrogen, DIW., exhaust, Drain, etc.

※ It is designed by customers spec, and various applications can be corresponded easily.
     
           
    
        

Auto Spincoater


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We have a case unlike the real thing to a product of a photograph.
  Name : Auto Spincoater
Model : TASC-3000
 
icon.gifFeature
     For production,cost perfomance,Small lots design
 
icon.gifSpecification
   
Substrate size Φ2"、3"、4"
Cup diameter Φ300mm
Range of revolution speed 100-5000 rpm
Revolution speed accuracy ±1rpm
Spindle motor AC servo motor
Revolution display Digital
Revolution speed setting Liquid crystal toch panel
Recipe setting Ten programs ×50 patterns
Option Vacuum chuck and Vacuum pump,Filter,etc
Utility  Power supply、CDA.、N2、vacuum

※This equipment is easy setting and operation for the application of small job lot manufacturing and compound semiconductors like cracks,and we will be able to design according to user's requirements.
     

                

株式会社トービ TEL:0471-84-7255 or 080-4075-1975(高橋)
 〒270-1164 千葉県我孫子市つくし野4-6-1-102