Spin Dryer


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We have a case unlike the real thing to a product of a photograph.
  Model : SPD-8262
 
icon.gifSpecification
   
Work size Φ6“、Φ8”two or four carriers
Chamber Diameter/Material Φ800mm SUS304
Body Material/Size SS with baked painting  W900×D1185×H1170
Spin Motor Induction motor with inverter
Number Of RPM 0〜1,000rpm、set as desired、option 1,200rpm
RPM. Indicator Digital tachometer
Number of steps 2 steps
Power supply  AC200V φ3 15A 50/60Hz ±10%
Dry Air 0.5Mpa. 5L/min and more RC1/4"
Exhaust 150mm dia. duct、8m3/min and more with an automatic damper
Drain 12A pvc pipe、8L/min

※ It is designed by customers spec, and various applications can be corresponded easily.
     

Multipurpose Processor/Spin Processor


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We have a case unlike the real thing to a product of a photograph.
  Model : TMS-401
 
icon.gifFeature
    It corresponds to the acid and the solvent by two kinds of body materials. (Please consults with us when you will study. The photo is PVC body. )
Multipurpose equipment that can be used for etching, cleaning, development, stripping、 dry 、etc.
 
icon.gifSpecification
   
Work size: Φ2 inch 〜 Φ8 inch
Clean unit HEPA filter
Cleaning Brush and MS as standard
Acid specification Acid and alkali type
Solvent specification IPA . Various solution such as acetones
Option High-pressure jet nozzle and chemical nozzle , Filter,etc.
Power supply AC100v or 200v

※ It is designed by customers spec, and various applications can be corresponded easily.
     


Multiple Spinner


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We have a case unlike the real thing to a product of a photograph.
  Model : TMSC-6000
 
icon.gifFeature
    Cassette to cassette type automatic multipurpose processor to be equipped with clean unit. (The photograph is coater + developer + hot plate. )
 
icon.gifSpecification
   
Work size: Φ6 inch 〜 Φ12 inch
Work transfer Three atmospheric axis clean robot
Clean unit ULPA filter
Data set display Liquid crystal touch panel
Coater Two nozzle and back rinse as standard
Developer Chemical temperature-controller, nozzle cleaning function, and back rinse as standard
Hot plate 3 steps for Drying + cooling
Option Spin Cleaner, Spin Coater, Spin Developer, Spin Etcher, Spin Remover Spin Dryer of 6 functions can be done in one equipment,or you can choose your required functions. High-pressure jet nozzle, UV, excimer, hot plate, Filter,etc.
Utility Power supply, CDA., nitrogen, DIW., exhaust, Drain, etc.

※ It is designed by customers spec, and various applications can be corresponded easily.
     

株式会社トービ TEL:0471-84-7255 or 080-4075-1975(高橋)
 〒270-1164 千葉県我孫子市つくし野4-6-1-102